Inverted pyramid 3-axis silicon Hall-effect magnetic sensor with offset cancellation.

 0 Người đánh giá. Xếp hạng trung bình 0

Tác giả: Udo Ausserlechner, Karen M Dowling, Helmut Köck, Jacopo Ruggeri

Ngôn ngữ: eng

Ký hiệu phân loại:

Thông tin xuất bản: England : Microsystems & nanoengineering , 2025

Mô tả vật lý:

Bộ sưu tập: NCBI

ID: 100930

Microelectronic magnetic sensors are essential in diverse applications, including automotive, industrial, and consumer electronics. Hall-effect devices hold the largest share of the magnetic sensor market, and they are particularly valued for their reliability, low cost and CMOS compatibility. This paper introduces a novel 3-axis Hall-effect sensor element based on an inverted pyramid structure, realized by leveraging MEMS micromachining and CMOS processing. The devices are manufactured by etching the pyramid openings with TMAH and implanting the sloped walls with n-dopants to define the active area. Through the use of various bias-sense detection modes, the device is able to detect both in-plane and out-of-plane magnetic fields within a single compact structure. In addition, the offset can be significantly reduced by one to three orders of magnitude by employing the current-spinning method. The device presented in this work demonstrated high in-plane and out-of-plane current- and voltage-related sensitivities ranging between 64.1 to 198 V A
Tạo bộ sưu tập với mã QR

THƯ VIỆN - TRƯỜNG ĐẠI HỌC CÔNG NGHỆ TP.HCM

ĐT: (028) 36225755 | Email: tt.thuvien@hutech.edu.vn

Copyright @2024 THƯ VIỆN HUTECH