Low-power 2D gate-all-around logics via epitaxial monolithic 3D integration.

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Tác giả: Feng Ding, Xiaoyin Gao, Xin Gao, Jianfeng Jiang, Zhongrui Li, Hailin Peng, Lian-Mao Peng, Chenguang Qiu, Congwei Tan, Junchuan Tang, Mengdi Wang, Chengyuan Xue, Yuling Yin, Chenxi Zhang

Ngôn ngữ: eng

Ký hiệu phân loại: 328.32 Lower houses

Thông tin xuất bản: England : Nature materials , 2025

Mô tả vật lý:

Bộ sưu tập: NCBI

ID: 105458

Innovations in device architectures and materials promote transistor miniaturization for improved performance, energy efficiency and integration density. At foreseeable ångström nodes, a gate-all-around (GAA) field-effect transistor based on two-dimensional (2D) semiconductors would provide excellent electrostatic gate controllability to achieve ultimate power scaling and performance delivering. However, a major roadblock lies in the scalable integration of 2D GAA heterostructures with atomically smooth and conformal interfaces. Here we report a wafer-scale multi-layer-stacked single-crystalline 2D GAA configuration achieved with low-temperature monolithic three-dimensional integration, in which high-mobility 2D semiconductor Bi
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