An introduction to time-of-flight secondary ion mass spectrometry (ToF-SIMS) and its application to materials science

• Tác giả: Sarah Fearn
• Ngôn ngữ: eng
• ISBN-13: 978-1681740249
• ISBN-13: 978-1681740881
• ISBN-13: 978-1681742168
• Ký hiệu phân loại: 543.65 Mass spectrometry (Mass spectroscopy)
• Thông tin xuất bản: San Rafael [California] (40 Oak Drive, San Rafael, CA, 94903, USA) : Morgan & Claypool Publishers, 2015
• Mô tả vật lý: 1 online resource (various pagings) : , illustrations (some color).
• Bộ sưu tập: Tài liệu truy cập mở
• ID: 161188
• Chủ đề: 1. Materials science; 2. Secondary ion mass spectrometry; 3. Time-of-flight mass spectrometry; 4. Microscopy; 5. TECHNOLOGY & ENGINEERING / Measurement

Includes bibliographical references.

Tóm tắt

This book highlights the application of Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) for high-resolution surface analysis and characterization of materials. While providing a brief overview of the principles of SIMS, it also provides examples of how dual-beam ToF-SIMS is used to investigate a range of materials systems and properties. Over the years, SIMS instrumentation has dramatically changed since the earliest secondary ion mass spectrometers were first developed. Instruments were once dedicated to either the depth profiling of materials using high-ion-beam currents to analyse near surface to bulk regions of materials (dynamic SIMS), or time-of-flight instruments that produced complex mass spectra of the very outer-most surface of samples, using very low-beam currents (static SIMS). Now, with the development of dual-beam instruments these two very distinct fields now overlap.