Defect complexes can induce beneficial functionalities in two-dimensional (2D) semiconductors. However, understanding their formation mechanism with single-atom sensitivity has proven to be challenging for light elements using conventional transmission electron microscopy (TEM) techniques. Here, we demonstrate the atom-resolved formation of various one-dimensional (1D) defect complexes─consisting of rhenium dopants, sulfur interstitials, and sulfur vacancies─in monolayer MoS