Environmental, safety, health, and sustainability (ESHS) have become an indispensable issue in the semiconductor industry. The 'Beyond CMOS' chapter of the International Roadmap for Devices and Systems roadmap introduces the concept of 'Green materials', emphasizing their importance for maintaining sustainability in semiconductor manufacturing. We discuss the current trends of emerging architectures and devices in the perspective of 'Green materials'. Additionally, we highlight the significance of benchmarking and standardization in advancing sustainable practices within the semiconductor industries.