Advances in Unconventional Lithography

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Tác giả: Gorgi Kostovski

Ngôn ngữ: eng

ISBN-13: 978-9535155966

Ký hiệu phân loại: 711 Area planning (Civic art)

Thông tin xuất bản: Croatia : IntechOpen, 2011

Mô tả vật lý: 1 electronic resource (200 p.)

Bộ sưu tập: Tài liệu truy cập mở

ID: 207197

The term Lithography encompasses a range of contemporary technologies for micro and nano scale fabrication. Originally driven by the evolution of the semiconductor industry, lithography has grown from its optical origins to demonstrate increasingly fine resolution and to permeate fields as diverse as photonics and biology. Today, greater flexibility and affordability are demanded from lithography more than ever before. Diverse needs across many disciplines have produced a multitude of innovative new lithography techniques. This book, which is the final instalment in a series of three, provides a compelling overview of some of the recent advances in lithography, as recounted by the researchers themselves. Topics discussed include nanoimprinting for plasmonic biosensing, soft lithography for neurobiology and stem cell differentiation, colloidal substrates for two-tier self-assembled nanostructures, tuneable diffractive elements using photochromic polymers, and extreme-UV lithography.
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