X-ray optics made by X-ray lithography: Process optimization and quality control

• Tác giả: Frieder Johannes Koch
• Ngôn ngữ: eng
• ISBN-13: 978-3731506799
• Thông tin xuất bản: Karlsruhe : KIT Scientific Publishing, 2017
• Mô tả vật lý: 1 electronic resource (X, 138 p. p.)
• Bộ sưu tập: Tài liệu truy cập mở
• ID: 226653

Tóm tắt

Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work.