A Paste-like Polymeric Resist with High Thermal Endurance for Vapor-Phase Bottom-Up Fabrication.

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Tác giả: Paddy Kwok Leung Chan, Ming Chen, Xing Cheng, Chun Li, Yan Shao, Haochuan Wang, Rui Xia, Lizhi Yan, Jiaxun Yao, Yanhao Yu, Zixin Zhang

Ngôn ngữ: eng

Ký hiệu phân loại: 627.12 Rivers and streams

Thông tin xuất bản: United States : Nano letters , 2025

Mô tả vật lý:

Bộ sưu tập: NCBI

ID: 236714

Bottom-up microfabrication based on vapor-phase depositions (e.g., sputtering and atomic layer deposition) requires patterning resists that can endure the parasitic thermal treatment during deposition. Conventional polymeric resists encounter removability issues due to thermally induced carbonization at the interface, while emerging molecular resists face challenges of hermeticity and shape retention in bulk. Here, we introduce a paste-like patterning resist with high interfacial and bulk thermal stability, which leads to multifaceted processing characteristics: this resist is hermetic and shape-preservable during the deposition and easily removable after the deposition. Based on a wetting-driven self-assembly process, we develop a nonphotolithographic patterning procedure for this paste resist and demonstrate high-accuracy and defect-free bottom-up patterning of dielectrics, semiconductors, and conductors. Beyond vapor-phase depositions, this resist is compatible with most manufacturing techniques, providing fruitful implications for bottom-up microfabrication.
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