Thin films of ZnO and Al-doped ZnO are deposited on glass wafer substratesusing a compressed sprayer system with Zn(CH3COO)2.2H2O and AlCl3 asprecursors. The influence of Al doping concentration on the crystal phase and morphologyof the samples is investigated by XRD and SEM, respectively. The results show that thefilms have been crystallized in the form of the wurtzite hexagonal phase of the ZnOlattice, and the addition of Al does not change the ZnO crystal structure. Despite this,SEM images show that added Al significantly affects the particle size of the samples.The particle size decreases and becomes more uniform as the Al concentrationincreases up to 7%. Further increasing the Al concentration causes the particles toagglomerate into clusters. The resistance measurements show that the sheetresistance of the films decreases in the presence of the Al dopant, providing evidencethat Al has been successfully doped into the ZnO crystal lattice. An appropriateamount of Al dopant can improve the alcohol vapor sensitivity of the film. The ZnOfilm doped with 7% Al exhibits the best alcohol sensitivity.Thin films of ZnO and Al-doped ZnO are deposited on glass wafer substratesusing a compressed sprayer system with Zn(CH3COO)2.2H2O and AlCl3 asprecursors. The influence of Al doping concentration on the crystal phase and morphologyof the samples is investigated by XRD and SEM, respectively. The results show that thefilms have been crystallized in the form of the wurtzite hexagonal phase of the ZnOlattice, and the addition of Al does not change the ZnO crystal structure. Despite this,SEM images show that added Al significantly affects the particle size of the samples.The particle size decreases and becomes more uniform as the Al concentrationincreases up to 7%. Further increasing the Al concentration causes the particles toagglomerate into clusters. The resistance measurements show that the sheetresistance of the films decreases in the presence of the Al dopant, providing evidencethat Al has been successfully doped into the ZnO crystal lattice. An appropriateamount of Al dopant can improve the alcohol vapor sensitivity of the film. The ZnOfilm doped with 7% Al exhibits the best alcohol sensitivity.