Abstract: Currently there are many methods to create ZNO and ZnO films : Al. That are: Radiation cathode, epitaxy by molecular beam, sol-gel, Electrostatic spray, Oxidation of Zn metal membranes, heat evaporation in the vacuum, Spray solution on the hot sole. In this paper, the author presents an overview of the preparation method of ZnO and ZnO:Al films and the results of structural studies of ZnO and ZnO:Al films.