Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction

• Tác giả: Minh Thinh Lam, Quoc Cuong Le, Vo Ke Thanh Ngo, Chi Cuong Nguyen, Minh Truong Phan, Xuan Thang Trinh, Huu Ly Truong, Dinh Duy Phuc Vuong
• Ngôn ngữ: eng
• Thông tin xuất bản: Vietnam Journal of Science, Technology and Engineering - C, 2024
• Mô tả vật lý: tr.3
• Bộ sưu tập: Metadata
• ID: 380230

Tóm tắt

At atmospheric pressure (p=101325 Pa), the effects of humidity and temperature on moist air become important when discussing the quality factor of micro-cantilever and micro-bridge resonators. The squeeze film damping (SFD) problem, the dominant damping source for micro-beam resonators, is modelled using the modified molecular gas lubrication (MMGL) equation with finite element modelling (FEM) in the eigenvalue problem.