Mechanics of microelectromechanical systems

• Tác giả: E Garcia, Nicolae Lobontiu
• Ngôn ngữ: eng
• ISBN-10: 1402080131
• Ký hiệu phân loại: 621.381 Electronics
• Thông tin xuất bản: New York : Kluwer Academic, 2005
• Mô tả vật lý: xi, 405 p. : , ill. ; , 25 cm.
• Bộ sưu tập: Khoa học ứng dụng
• ID: 43330
• Chủ đề: 1. Microelectromechanical systems

Includes bibliographical references and index.

Tóm tắt

"This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy."--BOOK JACKET.