A μGal MOEMS gravimeter designed with free-form anti-springs.

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Tác giả: Wei Huang, Chao Jiang, Pengfei Li, Qianbo Lu, Jiaxin Sun, Xiaoxu Wang, Zhenshan Wang, Shuang Wu, Qingxiong Xiao, Wenhui Yan, Guantai Yang, Yaoxian Yang, Zhongyang Yao, Xinlong Yu, Qixuan Zhu

Ngôn ngữ: eng

Ký hiệu phân loại: 261.836 Population

Thông tin xuất bản: England : Nature communications , 2025

Mô tả vật lý:

Bộ sưu tập: NCBI

ID: 469156

Gravimeter measures gravitational acceleration, which is valuable for geophysical applications such as hazard forecasting and prospecting. Gravimeters have historically been large and expensive instruments. Micro-Electro-Mechanical-System gravimeters feature small size and low cost through scaling and integration, which may allow large-scale deployment. However, current Micro-Electro-Mechanical-System gravimeters face challenges in achieving ultra-high sensitivity under fabrication tolerance and limited size. Here, we demonstrate a μGal-level Micro-Opto-Electro-Mechanical-System gravimeter by combining a freeform anti-spring design and an optical readout. A multi-stage algorithmic design approach is proposed to achieve high acceleration sensitivity without making high-aspect ratio springs. An optical grating-based readout is integrated, offering pm-level displacement sensitivity. Measurements reveal that the chip-scale sensing unit achieves a resonant frequency of 1.71 Hz and acceleration-displacement sensitivity of over 95 μm/Gal with an etching aspect ratio of smaller than 400:30. The benchmark with a commercial gravimeter PET demonstrates a self-noise of 1.1 μGal Hz
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