The genesis of conductivity at the interface between two insulating perovskite oxides is the subject of rigorous investigation within the scientific community. The emergence of conductivity observed at the interface between insulating LaScO3 (LSO) and SrTiO3 (STO) is attributed to the phenomenon known as polar catastrophe. In this study, we fabricated LSO films on TiO2-terminated STO substrates using the pulsed laser deposition technique. The investigation revealed a correlation between the film resistance and the variation in laser energy density during the deposition process, emphasizing the influence of energy density modulation on the electronic properties of the films. Also, the effect of cation non-stoichiometry in LSO films on mobility is examined and compared with the previously documented LAO/STO and LVO/STO interfaces.