PHÁT TRIỂN VI CHẤP HÀNH ĐIỆN NHIỆT KIỂU DẦM CHỮ V ĐỂ DẪN ĐỘNG VI ĐỘNG CƠ QUAY MỘT CHIỀU=DEVELOPMENT OF A V-SHAPED ELECTROTHERMAL MICRO ACTUATOR FOR UNIDIRECTIONAL ROTARY MOTOR DRIVING

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Tác giả: Trung Kiên Hoàng, Tiến Dũng Nguyễn, Hồng Phúc Phạm

Ngôn ngữ: vie

Ký hiệu phân loại:

Thông tin xuất bản: Tạp chí Khoa học và Công nghệ - Đại học Thái Nguyên, 2024

Mô tả vật lý: tr.45726

Bộ sưu tập: Metadata

ID: 480235

Thêm vào giỏ

Bài báo phát triển các bộ vi kích hoạt, tính toán, thiết kế cấu trúc vi động cơ quay một chiều sử dụng bốn bộ vi chấp hành điện nhiệt chữ V đặt đối xứng để dẫn động vành răng rotor bên ngoài. Vi động cơ có đường kính ngoài 2,5 mm được tính toán truyền nhiệt dựa trên phương pháp sai phân hữu hạn, cho độ chính xác tương đối cao so với kết quả mô phỏng. Các tính toán về lực và điều kiện điện áp cho vi động cơ có thể làm việc an toàn cũng được đề cập chi tiết. Quy trình chế tạo vi cơ khối cải tiến sử dụng tấm silic kép (silicon on insulator- SOI) và công nghệ phún xạ bề mặt platinum nhằm giảm điện áp dẫn cho linh kiện đã được áp dụng thành công. Kết quả chụp mẫu vi động cơ từ kính hiển vi quét (SEM) cho hình ảnh các cơ cấu có độ sắc nét cao và phù hợp với thiết kế. Vi động cơ có tiềm năng ứng dụng trong các khớp truyền động quay của hệ thống micro robot hoặc trong các hệ thống vi lắp ráp, vi vận chuyển của các hệ thống tích hợp micro.This paper presents the development of V-Shaped Electrothermal Micro actuators to design a new rotational micro motor (RMM), which consists of ratchet teeth, an outer ring (or rotor), and four symmetrically V-Shaped Electrothermal Micro actuators. The rotational micro motor has an outer diameter of only 2.5 mm and is thermally calculated using the finite difference method, showing high accuracy compared to simulation results. Force calculations and working voltage conditions are also discussed in detail. An improved bulk - micromachining process using silicon on insulator (SOI) wafer and platinum sputter surface deposition to reduce the driving voltage has been applied successfully. The micromotor samples have been successfully experimentally manufactured. High-resolution images captured by a scanning electron microscope (SEM) showcase remarkable clarity and closely resemble the blueprint. In the near future, the micromotor can be applied in different rotating transmission joints such as micro robot systems, micro - assembly, micro - transportation systems, micro -integrated systems, biochemical analysis system, and other applications.

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