This paper presents a novel micro linear motor with simulation and measurement of electrothermal actuators based on thermal expansion of V-shape silicon beams when applying a voltage. The processes have been carried out with three types of motors with different numbers of thermal expansion beams, i.e. 3, 6 and 10 in U = 5 + 30V voltage range. Measured displacements of the motor shuttle are from 12 to 18 pm and driving force can reach tens of millinewton (mN). By measurement of the step displacement with driving frequency from 1 to 30 Hz, it can be seen that the optimal range of applied voltage is from 15 to 30 V. The displacements increase with the larger number of actuator beams. The advantages of the motor are small size, simple fabrication process with only single mask, high accuracy control.