Selective Undercut of Undoped Optical Membranes for Spin-Active Color Centers in 4H- Silicon Carbide.

 0 Người đánh giá. Xếp hạng trung bình 0

Tác giả: Aaron M Day, Jonathan Dietz, Evelyn L Hu, Amberly Xie

Ngôn ngữ: eng

Ký hiệu phân loại: 573.1636 *Circulatory system

Thông tin xuất bản: United States : ACS nano , 2025

Mô tả vật lý:

Bộ sưu tập: NCBI

ID: 62171

Silicon carbide (SiC) is a semiconductor used in quantum information processing, microelectromechanical systems, photonics, power electronics, and harsh environment sensors. However, its high-temperature stability, high breakdown voltage, wide bandgap, and high mechanical strength are accompanied by a chemical inertness, which makes complex micromachining difficult. Photoelectrochemical (PEC) etching is a simple, rapid means of wet processing SiC, including the use of dopant-selective etch stops that take advantage of the mature SiC homoepitaxy. However, dopant-selective PEC etching typically relies on highly doped material, which poses challenges for device applications such as quantum defects and photonics that benefit from low doping to produce robust emitter properties and high optical transparency. In this work, we develop a selective PEC process that relies not on high doping but on the electrical depletion of a fabricated diode structure, allowing the selective etching of an
Tạo bộ sưu tập với mã QR

THƯ VIỆN - TRƯỜNG ĐẠI HỌC CÔNG NGHỆ TP.HCM

ĐT: (028) 36225755 | Email: tt.thuvien@hutech.edu.vn

Copyright @2024 THƯ VIỆN HUTECH