Bộ đo gia tốc điện áp có các độ phân giải trục điều chỉnh

• Tác giả: Thu Hang Bui, Duc Trinh Chu, Duc Tan Tran
• Ngôn ngữ: vie
• Ký hiệu phân loại: 621.38154 Electrical, magnetic, optical, communications, computer engineering; electronics, lighting
• Thông tin xuất bản: Vietnam Journal of Mechanics, 2012
• Mô tả vật lý: 45-54
• Bộ sưu tập: Metadata
• ID: 626472

Tóm tắt

 A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor
  structure.