Cải tiến mô tơ quay siêu nhỏ và ứng dụng trong hệ thống bánh răng

• Ngôn ngữ: vie
• Ký hiệu phân loại: 621.8 Machine engineering
• Thông tin xuất bản: Khoa học và Công nghệ, 2012
• Mô tả vật lý: 79-83
• Bộ sưu tập: Metadata
• ID: 629869

Tóm tắt

This paper presents the design and fabrication of a Micro Rotational Motor (MRM) and its applications in which four micro rotational comb-drive actuators (MRCA) are used to drive the rotor through ratchet teeth. For the gearing system, a ring with ratchet teeth inside and involute teeth outside will be used instead of the rotor. The novel design of the anti-reverse and anti-gap structure overcomes the gap problem after deep reactive ion etching of silicon. The actuators and gearing system have been fabricated by using a SOI wafer with the device layer of 30 um and tested for performance. They are driven by a periodic voltage (Vpp = 80 V) with different frequencies ranging from 1 Hz to 30 Hz. In this range, the angular velocity of the ratchet ring was proportional with the frequency and matched very well with theoretical calculation.