Piezoresistive Platinum Diselenide Pressure Sensors with Reliable High Sensitivity and Their Integration into Complementary Metal-Oxide-Semiconductor Circuits.

• Tác giả: Sofía Cruces, Eva Desgué, Nikolas Dominik, Georg S Duesberg, Michael Gross, Oliver Hartwig, Stefan Heiserer, Pierre Legagneux, Max C Lemme, Sebastian Lukas, Cormac Ó Coileáin, Maximilian Prechtl, Nico Rademacher, Arto Rantala, Juha-Matti Saari, Miika Soikkeli, Tanja Stimpel-Lindner
• Ngôn ngữ: eng
• Ký hiệu phân loại: 599.752 *Felis
• Thông tin xuất bản: United States : ACS nano , 2025
• Bộ sưu tập: NCBI
• ID: 680053

Tóm tắt

Membrane-based sensors are an important market for microelectromechanical systems (MEMS). Two-dimensional (2D) materials, with their low mass, are excellent candidates for suspended membranes to provide high sensitivity, small footprint sensors. The present work demonstrates pressure sensors employing large-scale-synthesized 2D platinum diselenide (PtSe