3D printing of micro-nano devices and their applications.

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Tác giả: Junyu Feng, Qiuquan Guo, Jianming Huang, Zhanhong Lin, Junfa Mao, Zilai Wang, Jun Yang, Linghao Yu, Dongxing Zhang, Naibo Zhang, Zixin Zhao

Ngôn ngữ: eng

Ký hiệu phân loại: 940.422 1914, eastern front

Thông tin xuất bản: England : Microsystems & nanoengineering , 2025

Mô tả vật lý:

Bộ sưu tập: NCBI

ID: 681076

In recent years, the utilization of 3D printing technology in micro and nano device manufacturing has garnered significant attention. Advancements in 3D printing have enabled achieving sub-micron level precision. Unlike conventional micro-machining techniques, 3D printing offers versatility in material selection, such as polymers. 3D printing technology has been gradually applied to the general field of microelectronic devices such as sensors, actuators and flexible electronics due to its adaptability and efficacy in microgeometric design and manufacturing processes. Furthermore, 3D printing technology has also been instrumental in the fabrication of microfluidic devices, both through direct and indirect processes. This paper provides an overview of the evolving landscape of 3D printing technology, delineating the essential materials and processes involved in fabricating microelectronic and microfluidic devices in recent times. Additionally, it synthesizes the diverse applications of these technologies across different domains.
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