Zig-zag ScAlN 12-layer for shear mode BAW transformer application in rectenna.

• Tác giả: R Karasawa, S Kinoshita, M Matsumura, Y Shimano, T Yanagitani
• Ngôn ngữ: eng
• Ký hiệu phân loại: 546.66 Group 12
• Thông tin xuất bản: United States : IEEE transactions on ultrasonics, ferroelectrics, and frequency control , 2025
• Bộ sưu tập: NCBI
• ID: 684516

Tóm tắt

Wireless power transfer (WPT) with rectennas is important for IoT sensor applications. Miniature GHz voltage transformers are more attractive than a large-size charge pump to operate the rectifiers efficiently. In this study, GHz bulk acoustic wave (BAW) piezoelectric transformers based on c-axis zig-zag polarization-inverted ScAlN thin films are proposed. The capacitive impedance (Z