Neural network-based analysis algorithm on Mueller matrix data of spectroscopic ellipsometry for the structure evaluation of nanogratings with various optical constants.

• Tác giả: Won Chegal, Yong Jai Cho, Juwon Jung, Kibaek Kim, Nagyeong Kim, Young-Joo Kim, Jongkyoon Park
• Ngôn ngữ: eng
• Ký hiệu phân loại: 001.44 Support of and incentives for research
• Thông tin xuất bản: Germany : Nanophotonics (Berlin, Germany) , 2025
• Bộ sưu tập: NCBI
• ID: 691461

Tóm tắt

Accurate and fast characterization of nanostructures using spectroscopic ellipsometry (SE) is required in both industrial and research fields. However, conventional methods used in SE data analysis often face challenges in balancing accuracy and speed, especially for the