Nanoparticles (NPs) and their fabrication routes are intensely studied for their wide range of application in optics, chemistry, and medicine. Γ-ray and ion irradiation of precursor matter are established methods that facilitate tailored NP synthesis without complicated chemistry. Here, we develop and explore NP synthesis based on irradiating precursor microparticles with low-energy electron beams. We specifically demonstrate the fabrication of plasmonic gold nanoparticles of sizes between 3 and 350 nm on an amorphous SiO