High-Yield and High-Accuracy Mass Transfer of Full-Color Micro-LEDs Using a Blister-Type Dynamic Release Polymer.

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Tác giả: Xinrui Huang, Zhonghang Huang, Jinkun Jiang, Taifu Lang, Chang Lin, Xin Lin, Qian Liu, Jie Sun, Xuehuang Tang, Yujie Xie, Qun Yan

Ngôn ngữ: eng

Ký hiệu phân loại: 368.011 Rates

Thông tin xuất bản: United States : ACS applied materials & interfaces , 2025

Mô tả vật lý:

Bộ sưu tập: NCBI

ID: 743729

Micro light-emitting diode (Micro-LED) is widely regarded as a highly promising technology in the current display field due to its excellent performance, but the core issue hindering the further development of Micro-LED is how to achieve high-precision and high-yield transfer. In this study, laser-induced forward transfer (LIFT) is adopted as the main technique, and a novel blister-type dynamic release layer (DRL) material is selected, characterized by a gentle transfer process and minimal residue on the chip after transfer. Chip-on-wafer (COW) is a structure that fabricates a large number of Micro-LEDs (15 × 30 μm
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