Nanosheets Derived from Titanium Diboride as Gate Insulators for Atomically Thin Transistors.

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Tác giả: Chen Chen, Mayukh Das, Saptarshi Das, Kabeer Jasuja, Andrew Pannone, Anshul Rasyotra, Joan M Redwing, Dipanjan Sen, Yang Yang, Zhiyu Zhang

Ngôn ngữ: eng

Ký hiệu phân loại: 344.04638 Labor, social service, education, cultural law

Thông tin xuất bản: United States : ACS nano , 2025

Mô tả vật lý:

Bộ sưu tập: NCBI

ID: 749910

Development and integration of gate insulators that offer a low equivalent oxide thickness (EOT) while maintaining a physically thicker layer are critical for advancing transistor technology as device dimensions continue to shrink. Such materials can deliver high gate capacitance and yet reduce gate leakage, thereby minimizing static power dissipation without compromising performance. These insulators should also provide the necessary interface quality, thermal stability, switching endurance, and reliability. Here, we demonstrate that nanosheets derived from titanium diboride (NDTD), synthesized at room temperature using a scalable dissolution-recrystallization method, exhibit EOT ∼ 2 nm irrespective of the physical thickness when used as top gate dielectrics for monolayer MoS
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