In the integrated circuit manufacturing process, reverse osmosis (RO) membranes are widely used for wastewater reclamation. However, fouling by typical surfactants significantly reduces membrane efficiency and lifespan. This study investigates the fouling mechanisms of typical surfactants-cetyl trimethyl ammonium bromide (CTAB, cationic), sodium dodecyl sulfate (SDS, anionic), and polyoxyethylene octyl phenyl ether (TX, nonionic)-on RO membranes. Quartz crystal microbalance analysis results show that CTAB and TX exhibit significantly stronger adhesion to RO membranes than SDS. The order of adsorption mass on the membrane surface is CTAB >
TX >
SDS, with CTAB causing the most severe fouling. Molecular dynamics (MD) simulations indicate that unclustered CTAB molecules contribute to severe fouling by inserting into the membrane surface. As surfactant concentration increases, clustered CTAB is less likely to enter the membrane's surface layer. A comparison of oxidative technologies-continuous dual-wavelength ultraviolet (VUV/UV), intermittent VUV/UV, and intermittent VUV/UV with chlorine, ozone alone, chlorine alone, and ozone combined with chlorine (ozone/chlorine)- reveals that pre-treating surfactants with ozone/chlorine (simultaneous dosing at 10 mg/L each) before membrane filtration effectively controls fouling. After 30 min of treatment, 29 % of CTAB and 86 % of TX were degraded, respectively. Ozone/chlorine oxidation significantly alleviates membrane fouling, increasing the normalized steady-state permeate flux (J