Nanofabrication : nanolithography techniques and their applications

 0 Người đánh giá. Xếp hạng trung bình 0

Tác giả: Jos�e Mar�ia de Teresa

Ngôn ngữ: eng

ISBN-13: 978-0750326063

ISBN-13: 978-0750326070

ISBN-13: 978-0750326087

ISBN-13: 978-0750326094

Ký hiệu phân loại: 621.381531 Electrical, magnetic, optical, communications, computer engineering; electronics, lighting

Thông tin xuất bản: Bristol [England] (Temple Circus, Temple Way, Bristol BS1 6HG, UK) : IOP Publishing, 2020

Mô tả vật lý: 1 online resource (various pagings) : , illustrations (some color).

Bộ sưu tập: Tài liệu truy cập mở

ID: 160992

 A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today's research and technology, providing examples of its applications. The remainder of the book is split into two sections. The first section contains the most important and established nanolithography techniques. As well as a detailed description of each technique, the reader can obtain useful information about the main advantages and drawbacks of each technique in terms of resolution, throughput, number of steps needed, cost, etc. At the end of this section, the reader will be able to decide which technique to use for different applications. The second section explores more specific applications of the nanolithography techniques previously described
  as well as new techniques and applications. In some cases, the processes described in these chapters involve a combination of several nanolithography techniques. This section is less general but provides the reader with real examples.
Includes bibliographical references.
Tạo bộ sưu tập với mã QR

THƯ VIỆN - TRƯỜNG ĐẠI HỌC CÔNG NGHỆ TP.HCM

ĐT: (028) 71010608 | Email: tt.thuvien@hutech.edu.vn

Copyright @2024 THƯ VIỆN HUTECH